The present invention provides compounds, pharmaceutically acceptable compositions thereof, and methods of using the same.
本发明提供了化合物、药学上可接受的组合物以及使用它们的方法。
BIPHENYL DERIVATIVE, RESIST BOTTOM LAYER MATERIAL, BOTTOM LAYER FORMING METHOD, AND PATTERNING PROCESS
申请人:Kori Daisuke
公开号:US20120252218A1
公开(公告)日:2012-10-04
A biphenyl derivative having formula (1) is provided wherein Ar1 and Ar2 denote a benzene or naphthalene ring, and x and z each are 0 or 1. A material comprising the biphenyl derivative or a polymer comprising recurring units of the biphenyl derivative is spin coated and heat treated to form a resist bottom layer having improved properties, optimum values of n and k, step coverage, etch resistance, heat resistance, solvent resistance, and minimized outgassing.
ORGANIC FILM COMPOSITION, PROCESS FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPOUND
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20160336189A1
公开(公告)日:2016-11-17
An organic film composition including a compound represented by the following general formula (1),
wherein n1 and n2 each independently represent 0 or 1; “W” represents a single bond or any of structures represented by the following formula (2); R
1
represents any of structures represented by the following general formula (3); m1 and m2 each independently represent an integer of 0 to 7, with the proviso that m1+m2 is 1 to 14.
There can be provided an organic film composition for forming an organic film having dry etching resistance as well as advanced filling/planarizing characteristics.
RESIST UNDERLAYER FILM COMPOSITION AND PATTERNING PROCESS USING THE SAME
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20130087529A1
公开(公告)日:2013-04-11
There is disclosed A resist underlayer film composition, the resist underlayer film composition contains a truxene compound having a substituted or an unsubstituted naphthol group as shown by the following general formula (1). There can be provided a resist underlayer film composition to form a resist underlayer film being capable of reducing reflectance and having high etching resistance, heat resistance.
Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US10007183B2
公开(公告)日:2018-06-26
The invention provides a compound for forming an organic film having a partial structure represented by the following formula (ii),
wherein the ring structures Ar1, Ar2 and Ar3 each represent a substituted or unsubstituted benzene ring or naphthalene ring; e is 0 or 1; R0 represents a hydrogen atom or a linear, branched or cyclic monovalent organic group having 1 to 30 carbon atoms; L0 represents a linear, branched or cyclic divalent organic group having 1 to 32 carbon atoms; and the methylene group constituting L0 may be substituted by an oxygen atom or a carbonyl group. There can be provided an organic film composition for forming an organic film having high dry etching resistance as well as advanced filling/planarizing characteristics.