There is provided a fluorine-containing copolymer having an aliphatic monocyclic structure in the polymer trunk chain which has a number average molecular weight of from 500 to 1,000,000 and is represented by the formula (Ma):
- (M1) - (M2a) - (N) - (Ma)
in which
the structural unit M1 is a structural unit derived from an ethylenic monomer having 2 or 3 carbon atoms and at least one fluorine atom, the structural unit M2a is at least one structural unit which introduces an aliphatic monocyclic structure in the polymer trunk chain and is represented by the formula (a):
wherein R1 is at least one hydrocarbon group selected from the group consisting of a divalent hydrocarbon group having 1 to 8 carbon atoms and constituting a ring which may be further substituted with a hydrocarbon group or a fluorine-containing alkyl group and a divalent hydrocarbon group having ether bond which has the sum of carbon atoms and oxygen atoms of 2 to 8, constitutes a ring and may be further substituted with a hydrocarbon group or a fluorine-containing alkyl group; R2 is an alkylene group which has 1 to 3 carbon atoms and constitutes a ring; R3 and R4 are the same or different and each is a divalent alkylene group which has 1 or 2 carbon atoms and constitutes a ring; n1, n2 and n3 are the same or different and each is 0 or 1, the structural unit N is a structural unit derived from a monomer copolymerizable with the monomers to introduce the structural units M1 and M2a, and
the structural units M1, M2a and N are contained in amounts of from 1 to 99 % by mole, from 1 to 99 % by mole and from 0 to 98 % by mole, respectively. The fluorine-containing polymer possesses excellent dry etching resistance and transparency in a vacuum ultraviolet region.
有一种含
氟共聚物,其聚合物主链具有脂肪族单环结构,其平均分子量为 500 至 1,000,000 之间,由式(Ma)表示:
- (M1) - (M2a) - (N) - (Ma)
其中
结构单元 M1 是由具有 2 个或 3 个碳原子和至少一个
氟原子的
乙烯基单体衍生的结构单元, 结构单元 M2a 是在聚合物主链中引入脂肪族单环结构的至少一个结构单元,由式(a)表示:
其中 R1 是至少一个烃基,该烃基选自以下组别:具有 1 至 8 个碳原子的二价烃基,该烃基构成环,可进一步被烃基或含氟烷基取代;具有醚键的二价烃基,该烃基的碳原子和氧原子之和为 2 至 8,构成环,可进一步被烃基或含氟烷基取代;R2 是具有 1 至 3 个碳原子并构成环的亚烷基; R3 和 R4 相同或不同,且各自是具有 1 或 2 个碳原子并构成环的二价亚烷基; n1、n2 和 n3 相同或不同,且各自为 0 或 1, 结构单元 N 是衍生自可与单体共聚以引入结构单元 M1 和 M2a 的单体的结构单元,且
结构单元 M1、M2a 和 N 的含量分别为 1-99%(摩尔)、1-99%(摩尔)和 0-98%(摩尔)。这种含
氟聚合物具有优异的耐干蚀刻性和在真空紫外线区域的透明度。