申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:EP3832390A1
公开(公告)日:2021-06-09
An object of the present invention is to provide a useful underlayer film forming composition. The following underlayer film forming composition can solve the problem described above. An underlayer film forming composition comprising: a compound having a constituent unit represented by the following formula (1); and a solvent, wherein
the weight average molecular weight of the compound is 1,000 to 30,000 as the molecular weight in terms of polystyrene, and
the solubility of the compound in propylene glycol monomethyl ether acetate is 10% by mass at 23°C:
wherein
A is a single bond or a divalent group;
each R1 is independently a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkynyl group having 2 to 10 carbon atoms, a thiol group, or a hydroxy group;
each R2 is independently a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, an alkynyl group having 2 to 10 carbon atoms, a thiol group, or a hydroxy group,
where at least one R2 is a hydroxy group and/or a thiol group;
each m1 is independently an integer of 0 to 5;
each m2 is independently an integer of 0 to 8; and
each p2 is independently an integer of 0 to 2.
本发明的目的是提供一种有用的底层成膜组合物。下述底层成膜组合物可以解决上述问题。一种底层成膜组合物包括: 具有下式(1)代表的组成单元的化合物;和溶剂,其中
以聚苯乙烯的分子量计,该化合物的重量平均分子量为 1 000 至 30 000,以及
23°C 时,化合物在丙二醇单甲醚醋酸酯中的溶解度为 10%(质量分数):
其中
A 是单键或二价基团;
每个 R1 独立地是具有 1 至 10 个碳原子的直链、支链或环状烷基、具有 6 至 10 个碳原子的芳基、具有 2 至 10 个碳原子的烯基、具有 2 至 10 个碳原子的炔基、硫醇基或羟基;
每个 R2 独立地是具有 1 至 10 个碳原子的直链、支链或环状烷基、具有 6 至 10 个碳原子的芳基、具有 2 至 10 个碳原子的烯基、具有 2 至 10 个碳原子的炔基、硫醇基或羟基、
其中至少一个 R2 是羟基和/或硫醇基;
每个 m1 独立地为 0 至 5 的整数;
每个 m2 独立地为 0 至 8 的整数;以及
每个 p2 独立地为 0 至 2 的整数。