A photosensitive resin composition includes an alkali-soluble resin having a polybenzoxazol precursor structure or a polyimide precursor structure, or both, and a photosensitizer, the alkali-soluble resin having a ratio ([A]/[B]) of a cyclization rate [A] (%) at 250°C to a cyclization rate [B] (%) at 300°C of 0.70 or more. According to the present invention, a photosensitive resin composition which is highly sensitive and has high productivity in the manufacture of semiconductor devices, a cured film, a protective film, an insulating film, and a semiconductor device and a display device using the cured film can be provided.
光敏
树脂组合物包括具有聚
苯并恶唑前体结构或聚
酰亚胺前体结构或两者的碱溶性
树脂和光敏剂,碱溶性
树脂在250℃时的环化率[A](%)与300℃时的环化率[B](%)之比([A]/[B])为0.70或以上。根据本发明,可以提供一种在制造半导体器件时具有高灵敏度和高生产率的光敏
树脂组合物、固化膜、保护膜、绝缘膜以及使用该固化膜的半导体器件和显示器件。