Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process
申请人:Hasegawa Koji
公开号:US20070179309A1
公开(公告)日:2007-08-02
Fluoroalcohol compounds of formula (4) are prepared by reacting a fluorine compound of formula (1) with reducing agents or organometallic reagents of formulas (2) and (3) wherein R
1
is H or a monovalent C
1
-C
20
hydrocarbon group in which any —CH
2
— moiety may be replaced by —O— or —C(═O)—, R
2
is H or a monovalent C
1
-C
6
hydrocarbon group, R
3
and R
4
are H or a monovalent C
1
-C
8
hydrocarbon group, and M
1
is Li, Na, K, Mg, Zn, Al, B, or Si. From the fluoroalcohol compounds, fluorinated monomers can be produced in a simple and economic way, which are useful in producing polymers for the formulation of radiation-sensitive resist compositions.
通过将化学式(1)的氟化合物与化学式(2)和(3)的还原剂或有机金属试剂反应制备化学式(4)的氟醇化合物,其中R1是H或一价的碳1-碳20烃基,其中任何一个—CH2—基团可能被—O—或—C(═O)—替代,R2是H或一价的碳1-碳6烃基,R3和R4是H或一价的碳1-碳8烃基,M1是Li、Na、K、Mg、Zn、Al、B或Si。通过这些氟醇化合物,可以简单经济地生产氟化单体,这些单体在制备用于辐射敏感抗蚀剂组合物的聚合物中非常有用。