申请人:Maruzen Petrochemical Co., Ltd.
公开号:EP3763751A1
公开(公告)日:2021-01-13
Provided is a compound that can be used for a resin for a resist having excellent sensitivity, resolution, and etching resistance, or the like, by a compound represented by the following formula (1):
(wherein R1 represents a hydrogen atom or a methyl group, R2 represents an aliphatic hydrocarbon group having 1 to 6 carbon atoms, m represents an integer of 0 to 5, and n represents an integer of 0 to 4).
本发明提供了一种由下式(1)表示的化合物,该化合物可用于具有优异灵敏度、分辨率和抗蚀刻性等性能的抗蚀剂树脂:
(其中 R1 代表氢原子或甲基,R2 代表具有 1 至 6 个碳原子的脂肪族烃基,m 代表 0 至 5 的整数,n 代表 0 至 4 的整数)。