Novel Sulfonic Acid Salt and Derivative Thereof, Photoacid Generator Agent, and Resist Material and Pattern Formation Method Using the Photoacid Generator Agent
申请人:Maeda Kazuhiko
公开号:US20100304303A1
公开(公告)日:2010-12-02
Disclosed is a fluorinated sulfonic acid salt or fluorinated sulfonic acid group-containing compound having a structure represented by the following general formula (A).
In the formula, n indicates an integer of 1 to 10; R indicates a substituted or unsubstituted C
1
-C
20
linear, branched or cyclic alkyl group, a substituted or unsubstituted C
1
-C
20
linear, branched or cyclic alkenyl group, a substituted or unsubstituted C
6
-C
15
aryl group, or a C
4
-C
15
heteroaryl group; and a indicates 1 or 0. A photoacid generator containing the above fluorinated sulfonic acid salt or fluorinated sulfonic acid group-containing compound shows high sensitivity to an ArF excimer laser or the like, presents no concerns about human body accumulation, can generate an acid (photoacid) of sufficiently high acidity, and exhibits high solubility in a resist solvent and good compatibility with a resist resin.
本发明揭示了一种含有以下通式(A)所表示的结构的氟磺酸盐或含氟磺酸基的化合物。在公式中,n表示1到10的整数;R表示取代或未取代的C1-C20线性、支链或环烷基,取代或未取代的C1-C20线性、支链或环烯基,取代或未取代的C6-C15芳基,或C4-C15杂环基;a表示1或0。含有上述氟磺酸盐或含氟磺酸基的光酸发生剂对ArF准分子激光等具有高灵敏度,不存在人体积累的问题,能够产生足够高酸度的酸(光酸),并且在抗蚀剂溶剂中具有高溶解度和良好的与抗蚀树脂的相容性。