中文名称 | 英文名称 | CAS号 | 化学式 | 分子量 |
---|---|---|---|---|
苊醌 | acenaphthene quinone | 82-86-0 | C12H6O2 | 182.178 |
The designer of microelectromechanical systems (MEMS) can increase MEMS performance either by improved mechanical design or by the selection of a MEMS material with improved mechanical performance. In the quest to identify highperformance MEMS materials, diamond and amorphous carbon have recently emerged as a promising class of materials.