Heterogeneous polynuclear complex for use in the chemical deposition of composite metal or metal compound thin films
申请人:TANAKA KIKINZOKU KOGYO K.K.
公开号:US10407450B2
公开(公告)日:2019-09-10
A heterogeneous polynuclear complex for use as a raw material in the chemical deposition of composite metal or composite metal thin films with the below formula. In the formula, M1 and M2 are mutually different transition metals, x is an integer of 0 or more and 2 or less, y is in integer of 1 or more and 2 or less, z is an integer of 1 or more and 10 or less, R1 to R4 are each one of a hydrogen atom and an alkyl group with a carbon number of 1 or more and 5 or less, and R5 is a hydrogen atom, a carbonyl, an alkyl group with a carbon number of 1 or more and 7 or less, an allyl group or an allyl derivative. The heterogeneous polynuclear complex allows a composite metal thin film or a composite metal compound thin film containing a plurality of metals to be formed from a single raw material.
一种异质多核络合物,可用作复合金属或复合金属薄膜化学沉积的原料,其化学式如下。式中,M1 和 M2 是互不相同的过渡金属,x 是 0(含)以上 2(含)以下的整数,y 是 1(含)以上 2(含)以下的整数,z 是 1(含)以上 10(含)以下的整数,R1 至 R4 分别是氢原子和碳原子数为 1(含)以上 5(含)以下的烷基,R5 是氢原子、羰基、碳原子数为 1(含)以上 7(含)以下的烷基、烯丙基或烯丙基衍生物。异质多核络合物可以用单一原料形成含有多种金属的复合金属薄膜或复合金属化合物薄膜。