Photosensitization chemical-amplification type resist material, method for forming pattern using same, semiconductor device, mask for lithography, and template for nanoimprinting
申请人:TOKYO ELECTRON LIMITED
公开号:US10025187B2
公开(公告)日:2018-07-17
A photosensitization chemical-amplification type resist material according to the present invention is used for a two-stage exposure lithography process, and contains (1) a developable base component and (2) a component generating a photosensitizer and an acid through exposure. Among three components consisting of (a) an acid-photosensitizer generator, (b) a photosensitizer precursor, and (c) a photoacid generator, the above component contains only the component (a), any two components, or all of the components (a) to (c).
根据本发明,一种光敏化学放大型抗蚀剂材料用于两阶段曝光光刻工艺,它包含(1)可显影碱成分和(2)通过曝光产生光敏剂和酸的成分。在由(a)酸-光敏剂发生器、(b)光敏剂前体和(c)光酸发生器组成的三个组件中,上述组件只包含(a)组件、任意两个组件或(a)至(c)的所有组件。