Photopolymerizable compositions having improved sidewall geometry and development latitude
申请人:E.I. DU PONT DE NEMOURS AND COMPANY
公开号:EP0909990A2
公开(公告)日:1999-04-21
Photopolymerizable compositions and associated elements and processes are disclosed herein that upon imaging afford improved sidewall geometry and development latitude. These compositions contain a polymeric binder having the formula:
(A)w(B)x(C)y(D)z
where A is a substituted or unsubstituted C4-C10 alkyl methacrylate, B is a substituted or unsubstituted C4-C10 alkyl acrylate, C is selected from the group consisting of methyl methacrylate and ethyl methacrylate, and D is selected from the group consisting of methacrylic acid and acrylic acid; and
where w, x, y, and z are weight percentages of comonomers in the polymeric binder, w is 5 to 40%, x is 5 to 40%, y is 10 to 70%, and z is 15 to 30%. In certain embodiments, styrene is an optional additional comonomer of the polymeric binder.
本文公开了可光聚合的组合物及相关元件和工艺,这些组合物在成像时可改善侧壁几何形状和显影范围。这些组合物含有具有以下式子的聚合物粘合剂:
(A)w(B)x(C)y(D)z
其中 A 是取代或未取代的 C4-C10 烷基甲基丙烯酸酯,B 是取代或未取代的 C4-C10 烷基丙烯酸酯,C 选自甲基丙烯酸甲酯和甲基丙烯酸乙酯组成的组,D 选自甲基丙烯酸和丙烯酸组成的组;以及
其中 w、x、y 和 z 是聚合物粘合剂中共聚单体的重量百分比,w 为 5-40%,x 为 5-40%,y 为 10-70%,z 为 15-30%。在某些实施方案中,苯乙烯是聚合物粘合剂的一种可选附加单体。