ARRAY OF PIEZOELECTRIC RESONATORS FOR THE DETECTION OF TRACE AMOUNTS OF A SUBSTANCE
申请人:M.S. Tech Ltd.
公开号:EP1423685B1
公开(公告)日:2011-08-24
US7159463B2
申请人:——
公开号:US7159463B2
公开(公告)日:2007-01-09
US7795008B2
申请人:——
公开号:US7795008B2
公开(公告)日:2010-09-14
Sensitive and selective method and device for the detection of trace amounts of a substance
申请人:Dayagi Y. Yohai
公开号:US20070117983A1
公开(公告)日:2007-05-24
A piezoelectric crystal element and a sensor utilizing the same are presented for use in a sensor device for identifying at least one foreign material from environment. The crystal element comprises at least one crystal resonator in the form of a inverted mesa structure, which has a membrane-like region and has a certain resonance frequency value. A surface region of the crystal resonator is modified by reactive molecules of a kind capable of interacting with the foreign material to yield a reaction product that effects a change in the resonance frequency of the crystal resonator from said certain resonance frequency value. This change is indicative of the identity and quantity of the foreign material.