A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body.
wherein R
1
represents a hydrogen atom or the like, M
+
represents a specific cation, and n is an integer from 1 to 5.
以下是翻译结果:
一种包括以下公式(10)所示的重复单元的
树脂具有出色的辐射敏感酸发生剂性能,对环境和人体只有很小的负面影响。其中,R1代表氢原子或类似物,M+代表特定的阳离子,n为1至5的整数。