CLEANING LIQUID FOR MATERIAL COMPRISING CARBON-CONTAINING SILICON OXIDE FOR WAFER RECYCLING, AND CLEANING METHOD
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:EP3285285A1
公开(公告)日:2018-02-21
It is an object of the present invention to provide a cleaning solution for removing carbon-incorporated silicon oxide (SiOC) from the surface of a wafer in a step of producing a wafer having a material comprising the SiOC, and a cleaning method of using the same. The cleaning solution of the present invention comprises 2% by mass to 30% by mass of a fluorine compound, 0.0001% by mass to 20% by mass of a specific cationic surfactant that is an ammonium salt or an amine, and water, and has a pH value of 0 to 4.
HERBICIDAL AND PLANT GROWTH REGULANT COMPOSITIONS AND THEIR USE
申请人:ALBEMARLE CORPORATION
公开号:EP0891136A1
公开(公告)日:1999-01-20
ANION EXCHANGE MATERIALS AND PROCESSES
申请人:BIOCOMPATIBLES LIMITED
公开号:EP0939779A1
公开(公告)日:1999-09-08
ANTI-GEL AGENT FOR POLYHYDROXYETHERAMINES, GEL STABILIZED POLYHYDROXYETHERAMINE SOLUTIONS, AND METHODS FOR MAKING AND USING SAME
申请人:CLEARWATER INTERNATIONAL, LLC
公开号:US20150197682A1
公开(公告)日:2015-07-16
Anti-gel agents for polyhydroxyetheramines/copolyhydroxyetheramines and gel stabilized polyhydroxyetheramine/copolyhydroxyetheramine solutions including a polymer system including polyhydroxyetheramines and/or copolyhydroxyetheramines and an anti-gel system including quaternary ammonium compounds, quaternary phosphonium compounds, or mixtures and combinations.
CLEANING SOLUTION AND CLEANING METHOD FOR MATERIAL COMPRISING CARBON-INCORPORATED SILICON OXIDE FOR USE IN RECYCLING WAFER
申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:US20180087006A1
公开(公告)日:2018-03-29
It is an object of the present invention to provide a cleaning solution for removing carbon-incorporated silicon oxide (SiOC) from the surface of a wafer in a step of producing a wafer having a material comprising the SiOC, and a cleaning method of using the same. The cleaning solution of the present invention comprises 2% by mass to 30% by mass of a fluorine compound, 0.0001% by mass to 20% by mass of a specific cationic surfactant that is an ammonium salt or an amine, and water, and has a pH value of 0 to 4.