申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20220413383A1
公开(公告)日:2022-12-29
Disclosed are a salt represented by formula (I), an acid generator, and a resist composition comprising the same:
wherein R
1
and R
2
each represent a hydroxy group, *—O—R
10
, *—O-L
10
-CO—O—R
10
; L
10
represents an alkanediyl group; R
10
represents an acid-labile group; R
4
, R
5
, R
7
and R
8
each represent a halogen atom, a haloalkyl group or a hydrocarbon group; A
1
and A
2
each represent a hydrocarbon group, the hydrocarbon group may have a substituent, and —CH
2
— included in the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO
2
—; m1 represents an integer of 1 to 5, m2 and m8 represent an integer of 0 to 5, m4, m5 and m7 represent an integer of 0 to 4, 1≤m1+m7≤5, 0≤m2+m8≤5; and AI
−
represents an organic anion.