申请人:Kansai Research Institute, Inc.
公开号:EP1375463A1
公开(公告)日:2004-01-02
A photoactive compound is used in combination with a photosensitizer, represented by the following formula (1):
A-[(J)m-(X-Pro)]n (1)
wherein A represents a hydrophobic unit comprising at least one kind of hydrophobic groups selected from a hydrocarbon group and a heterocyclic group, J represents a connecting group, X-Pro represents a hydrophilic group protected by a protective group Pro which is removable by light exposure, m represents 0 or 1, and n represents an integer of not less than 1.
The protective group Pro may be removable by light exposure in association with the photosensitizer (especially, a photo acid generator), or may be a hydrophobic protective group. The hydrophilic group may be a hydroxyl group or a carboxyl group. The photoactive compound has high sensitivity to a light source of short wavelength beams, for resist application, therefore, the photoactive compound is advantageously used for forming a pattern with high resolution.
光活性化合物与光敏剂结合使用,光敏剂由下式(1)表示:
A-[(J)m-(X-Pro)]n (1)
其中 A 代表疏水单元,包括至少一种选自烃基和杂环基的疏水基团;J 代表连接基团;X-Pro 代表亲水基团,该亲水基团受保护基团 Pro 的保护,该保护基团可通过光照去除;m 代表 0 或 1;n 代表不小于 1 的整数。
保护基 Pro 可以通过与光敏剂(特别是光酸发生器)一起进行光照射而去除,也可以是疏水保护基。亲水基团可以是羟基或羧基。光活性化合物对短波长光束的光源具有很高的灵敏度,因此在抗蚀剂应用中,光活性化合物可用于形成具有高分辨率的图案。