Photoacid-generating compound and associated polymer, photoresist composition, and method of forming a photoresist relief image
申请人:Rohm and Haas Electronic Materials LLC
公开号:US10088749B2
公开(公告)日:2018-10-02
A photoacid-generating compound has the structure
wherein m, n, R1, R2, X, Y, and Z− are defined herein. The photoacid-generating compound exhibits strong absorption and chemical sensitivity to extreme ultraviolet radiation, while also absorbing longer wavelengths with desirably reduced chemical sensitivity. Also described are a polymer incorporating the residue of a polymerizable version of the photoacid-generating compound, a photoresist composition that includes the photoacid-generating compound, the polymer, or a combination thereof, and a method of forming a photoresist relief image using the photoresist composition.
光酸生成化合物的结构是
其中 m、n、R1、R2、X、Y 和 Z- 在本文中定义。这种光酸生成化合物对极端紫外线辐射具有很强的吸收能力和化学敏感性,同时还能吸收较长波长的辐射,化学敏感性明显降低。此外,还描述了一种包含光酸生成化合物可聚合型残留物的聚合物,一种包含光酸生成化合物、聚合物或其组合的光刻胶组合物,以及一种使用该光刻胶组合物形成光刻胶浮雕图像的方法。