Novolak resin precursor, novolak resin and positive photoresist composition containing the novolak resin
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:EP0902326A2
公开(公告)日:1999-03-17
A novolak resin precursor is composed of bonded phenolic moieties, one of the hydrogen atoms in the o- or p-positions relative to the hydroxy group of each phenolic moiety is substituted with an alkyl or alkenyl group having 1 to 3 carbon atoms, and the other two hydrogen atoms are bonded through methylene bonds. The content of ortho-ortho bonding is 30 to 70% relative to the number of total methylene bonds and the weight average molecular weight of the precursor is 300 to 10,000. A novolak resin is obtained from this precursor, and a positive photoresist composition comprises this novolak resin. The invention provides a positive photoresist composition that comprises less binuclear compounds, suppresses scum formation, is excellent in terms of definition and coating performance and provides a resist pattern having satisfactory heat resistance.
一种新酚醛树脂前体由键合的酚基组成,每个酚基的 o 位或 p 位上相对于羟基的一个氢原子被具有 1 至 3 个碳原子的烷基或烯基取代,另外两个氢原子通过亚甲基键键合。相对于亚甲基键总数,正交-正交键的含量为 30%至 70%,前体的重量平均分子量为 300 至 10,000。从这种前体中可以得到一种酚醛树脂,一种正性光刻胶组合物就包含这种酚醛树脂。本发明提供的正性光刻胶组合物含有较少的双核化合物,可抑制浮渣的形成,具有优异的清晰度和涂布性能,并提供具有令人满意的耐热性的抗蚀图案。