A photosensitive resin composition which contains a compound represented by general formula (1). (In general formula (1), R1-R4 may be the same or different, and each represents a hydrogen atom or an organic group having 1-4 carbon atoms; and X represents a tetravalent organic group having two or more structural units represented by general formula (2) in the main chain.) (In general formula (2), R5 represents a hydrogen atom or an alkyl group having 1-20 carbon atoms, and a plurality of R5s in the same molecule may be the same or different.) Provided is a photosensitive resin composition which enables the achievement of a cured film having low stress after being heated and fired, and which has excellent long-term stability, high sensitivity and high resolution.
一种光敏
树脂组合物,其中含有通式(1)所代表的化合物。(通式(1)中,R1-R4 可以相同或不同,各自代表氢原子或具有 1-4 个碳原子的有机基团;X 代表主链上具有两个或多个通式(2)所代表结构单元的四价有机基团)。(在通式(2)中,R5 代表氢原子或具有 1-20 个碳原子的烷基,同一分子中的多个 R5 可以相同或不同)。本发明提供了一种光敏
树脂组合物,该组合物能够获得加热和烧制后应力较小的固化膜,并且具有出色的长期稳定性、高灵敏度和高分辨率。