Rational and practical synthesis of α,α-difluoro-γ-lactams
摘要:
Treatment of N-phenyl-iododifluoroacetamide (1) with terminal alkenes (2) in the presence of Na2S2O4 and NaHCO3 in CH3CN/H2O gave good yields of N-phenyl-2,2-difluoro-4-iodoalkanamide (3), which cyclized under strong basic conditions to afford N-phenyl-alpha,alpha-difluoro-gamma-lactams (4). Or simply, these lactams 4 can be directly prepared in one-pot from 1 and 2 in the presence of Na2S2O4 and NaOH. (C) 2011 Elsevier B.V. All rights reserved.
FLUORINATED SULFONATE ESTERS OF ARYL KETONES FOR NON-IONIC PHOTO-ACID GENERATORS
申请人:International Business Machines Corporation
公开号:US20180046077A1
公开(公告)日:2018-02-15
Non-ionic photo-acid generating (PAG) compounds were prepared that contain an aryl ketone group having a perfluorinated substituent alpha to the ketone carbonyl. The non-polymeric PAGs release a sulfonic acid when exposed to high energy radiation such as deep UV or extreme UV light. The photo-generated sulfonic acid has a low diffusion rate in an exposed resist layer subjected to a post-exposure bake (PEB) at 100° C. to 150° C., resulting in formation of good line patterns after development. At higher temperatures, the PAGs can also undergo a thermal reaction to form a sulfonic acid. The perfluorinated substituent provides improved thermal stability and hydrolytic/nucleophilic stability.
Non-ionic photo-acid generating (PAG) compounds were prepared that contain an aryl ketone group. The disclosed non-polymeric PAGs release a strong sulfonic acid when exposed to high energy radiation such as deep UV or extreme UV light. The photo-generated sulfonic acid has a low diffusion rate in an exposed resist layer subjected to a post-exposure bake (PEB) at 100° C. to 150° C., resulting in formation of good line patterns after development. At higher temperatures, the PAGs undergo a thermal reaction to form a sulfonic acid.
There are disclosed sulfonic acid precursor compositions, as are methods of using these compositions in, for example, photolithography. Other embodiments are also disclosed.