Metal organic compounds containing an amidinate ligand and their use for vapour phase deposition of metal containing thin films
申请人:L'AIR LIQUIDE, Société Anonyme pour l'Etude
et l'Exploitation des Procédés Georges Claude
公开号:EP2065390A1
公开(公告)日:2009-06-03
Compound of the formula (I):
(R1NC(R2)NR3)M(=NR4)y[(NR5R6)z1(NR7R8)z2]
wherein,
y is an integer, y ≥ 1,
z1 and z2 are integers, z1 ≥ 0 and z2 ≥ 0,
and, 2y + z1 + z2 = 4;
M is a group V metal selected from Tantalum (Ta), Niobium (Nb) and Vanadium (V),
R1, R2, R3, R4, R5, R6, R7, and R8 which may be identical or different, are independently chosen from Hydrogen atom, linear or branched alkyl groups having from one to six carbon atoms, linear or branched alkoxy groups having from one to six carbon atoms, linear or branched alkylamide groups having from one to six carbon atoms, linear or branched alkylsilylamide groups having from one to six carbon atoms, linear or branched alkylsilyl groups having from one to six carbon atoms.
化学式(I)的复合物:(R1NC(R2)NR3)M(=NR4)y[(NR5R6)z1(NR7R8)z2],其中,y是整数,y≥1,z1和z2是整数,z1≥0且z2≥0,且2y+z1+z2=4;M是从钽(Ta)、铌(Nb)和钒(V)中选择的五族金属,R1、R2、R3、R4、R5、R6、R7和R8可以相同也可以不同,独立地选择氢原子、具有一至六个碳原子的直链或支链烷基、具有一至六个碳原子的直链或支链烷氧基、具有一至六个碳原子的直链或支链烷基酰胺基、具有一至六个碳原子的直链或支链烷基硅氨基基团、具有一至六个碳原子的直链或支链烷基硅基团。