Barluenga, Jose; Aznar, Fernando; Liz, Ramon, Journal of the Chemical Society. Perkin transactions I, 1983, # 5, p. 1093 - 1098
作者:Barluenga, Jose、Aznar, Fernando、Liz, Ramon
DOI:——
日期:——
DIAZADIENYL COMPOUND, RAW MATERIAL FOR FORMING THIN FILM, METHOD FOR PRODUCING THIN FILM, AND DIAZADIENE COMPOUND
申请人:ADEKA CORPORATION
公开号:US20180037540A1
公开(公告)日:2018-02-08
A diazadienyl compound represented by General Formula (I) below:
wherein R
1
and R
2
each independently represent a C
1-6
linear or branched alkyl group, R
3
represents hydrogen, or a C
1-6
linear or branched alkyl group, M represents a metal atom or a silicon atom, and n represents a valence of the metal atom or silicon atom represented by M.