A radiation-sensitive composition comprising (i) an iodine-containing azide compound at least a part of which can be fixed substantially in a polymer by exposure to radiation and a polymer, or (ii) an azide compound, and an iodine compound at least a part of which can be fixed substantially in a polymer by exposure to a radiation and a polymer; and a said polymer substantially having compatibility with the azide compound in case (i) or the azide compound and the iodine compound in case (ii). This composition can be subjected to dry development with oxygen plasma after the exposure followed by heating, or it can be developed with an aqueous alkaline solution if the polymer is soluble therein.
一种对辐射敏感的组合物,包括:(i) 含
碘叠氮化合物,其中至少有一部分可通过辐射和聚合物的照射而基本固定在聚合物中,或 (ii)
叠氮化合物和
碘化合物,其中至少有一部分可通过辐射和聚合物的照射而基本固定在聚合物中;以及所述聚合物与(i)情况下的
叠氮化合物或(ii)情况下的
叠氮化合物和
碘化合物基本相容。这种组合物可以在曝光后用氧等离子体进行干显影,然后加热;如果聚合物可溶于碱性
水溶液,也可以用碱性
水溶液显影。