Norbornene polymer for photoresist and photoresist composition comprising the same
申请人:Lee Jun Jae
公开号:US20060188806A1
公开(公告)日:2006-08-24
Disclosed herein is a photoresist composition which includes a norbomene copolymer having an epoxy group, an acid generator, and an organic solvent. The norbomene polymer shows superior mechanical and thermal properties, high transparency, excellent insulating properties, and particularly, improved mechanical properties due to the presence of an epoxy group. The photosensitive resin composition shows superior performance, e.g., transparence, developing properties, residual film characteristics, chemical resistance, heat resistance, and flatness. Particularly, since the photosensitive resin composition enables easy formation of a pattern as an interlayer insulating film and shows a high light transmittance even when being formed into a thin film with a relatively large thickness, it is suitable for the production of an interlayer insulating film used in the fabrication processes of LCDs.
本文公开了一种光致抗蚀剂组合物,它包括一种具有环氧基团的诺布孟尼共聚物、一种酸生成物和一种有机溶剂。这种诺波明聚合物具有优异的机械和热性能、高透明度和出色的绝缘性能,特别是由于环氧基团的存在,其机械性能得到了改善。感光树脂组合物具有优异的性能,如透明度、显影性能、残膜特性、耐化学性、耐热性和平整度。特别是,由于该感光树脂组合物易于形成作为层间绝缘膜的图案,即使形成厚度相对较大的薄膜,也能显示出较高的透光率,因此适用于生产用于液晶显示器制造工艺的层间绝缘膜。