COMPOUND, RESIN, COMPOSITION AND FILM-FORMING MATERIAL FOR LITHOGRAPHY USING SAME
申请人:MITSUBISHI GAS CHEMICAL COMPANY, INC.
公开号:EP3760611A1
公开(公告)日:2021-01-06
A compound represented by the following formula (0).
(In the above formula (0),
RX represents a 2nA-valent group having 1 to 70 carbon atoms or a single bond;
each R1A independently represents any of an alkyl group having 1 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, a crosslinkable group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 1 to 30 carbon atoms and optionally having a substituent, a maleamic acid group having 4 to 30 carbon atoms and optionally having a substituent, a maleimide group having 4 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group having 0 to 30 carbon atoms and optionally having a substituent, a carboxyl group, a thiol group and a hydroxy group, wherein, when R1A is any of the alkyl group, the aryl group, the crosslinkable group and the alkoxy group, at least one bond selected from the group consisting of an ether bond, a ketone bond and an ester bond is optionally contained, and at least one R1A is any of a maleamic acid group having 4 to 30 carbon atoms and optionally having a substituent and a maleimide group having 4 to 30 carbon atoms and optionally having a substituent;
X represents an oxygen atom or a sulfur atom, or is optionally not present;
each R independently represents any of a benzene ring, a naphthalene ring and an anthracene ring;
each m is independently an integer of 0 to 9, wherein at least one m is an integer of 1 to 9; and
nA is an integer of 1 to 4.)
下式(0)所代表的化合物。
(在上式(0)中
RX 代表具有 1 至 70 个碳原子的 2nA 价基团或单键;
每个 R1A 独立地代表具有 1 至 30 个碳原子且任选具有一个取代基的烷基、具有 6 至 30 个碳原子且任选具有一个取代基的芳基、具有 2 至 30 个碳原子且任选具有一个取代基的可交联基团、具有 1 至 30 个碳原子且任选具有一个取代基的烷氧基、具有 4 至 30 个碳原子且任选具有一个取代基的马来酰胺基团、具有 4 至 30 个碳原子且任选具有一个取代基的马来酰亚胺基团、卤素原子、硝基中的任一种、具有 0 至 30 个碳原子且可选具有取代基的氨基、羧基、硫醇基和羟基, 其中,当 R1A 为烷基、芳基、可交联基团和烷氧基中的任一个时,至少有一个键选 自由以下组成的组醚键、酮键和酯键、且至少一个 R1A 是具有 4 至 30 个碳原子且可选具有取代基的马来酰胺基和具有 4 至 30 个碳原子且可选具有取代基的马来酰亚胺基中的任一种;
X 代表氧原子或硫原子,或可选择不存在;
每个 R 独立地代表苯环、萘环和蒽环中的任一环;
每个 m 独立地为 0 至 9 的整数,其中至少一个 m 为 1 至 9 的整数;以及
nA 是 1 至 4 的整数)。