申请人:Kramer John W.
公开号:US20120328983A1
公开(公告)日:2012-12-27
A polymer comprises the polymerized product of monomers comprising an acid-deprotectable monomer, a base-soluble monomer, a lactone-containing monomer, and a photoacid-generating monomer; a chain transfer agent of the formula;
wherein Z is a y valent C
1-20
organic group, x is 0 or 1, R
d
is a substituted or unsubstituted C
1-20
alkyl, C
3-20
cycloalkyl, C
6-20
aryl, or C
7-20
aralkyl; and optionally, an initiator.
这段话的意思是:该聚合物包括由单体聚合而成的产物,其中单体包括具有去保护酸单体、可溶于碱的单体、含有内酯的单体和光酸生成单体;以及具有以下式子的链转移剂:其中Z是一个y价的C1-20有机基团,x为0或1,Rd是取代或未取代的C1-20烷基、C3-20环烷基、C6-20芳基或C7-20芳基烷基;可选地,还包括引发剂。