A positive resist composition comprising (a) a resin that is decomposed by the action of an acid to increase solubility in an alkali developing solution, contains a structural unit having a group represented by formula (X) defined in the specification, has a weight average molecular weight of not more than 5,000, and contains an acid decomposable group in an amount of not more than 40% based on the sum total of a number of the acid decomposable group and a number of an alkali-soluble group not protected with the acid decomposable group, and (b) a compound that generates an acid upon irradiation of an actinic ray or radiation.
一种正性光刻胶组合物,包括(a)一种
树脂,该
树脂通过酸的作用分解以增加其在碱性显影液中的溶解度,其中包含一个由式(X)定义的基团,其重均分子量不超过5,000,且酸分解基团的含量不超过酸分解基团数量和未受酸分解基团保护的碱溶性基团数量之和的40%;以及(b)一种化合物,在光致射线或辐射的照射下生成酸。