A method is disclosed for making hydroxy-substituted ethynylated biphenyl compounds and for reacting such compounds with a family of noncross-linking thermosetting poly(arylene ethers) to produce novel poly(arylene ether) compositions which, when cured at glass transition temperatures greater than about 350.degree. C. to form thin films, possess properties such as low dielectric constant, low moisture absorption, and high thermal stability. These films are suitable for use as intermetal dielectrics for multilevel interconnection.
本发明公开了制备羟基取代的
乙炔化
联苯化合物的方法,并将这些化合物与一类非交联热固性聚芳醚家族反应,以产生新型聚芳醚组合物。当在
玻璃转变温度大于约350°C的条件下固化成薄膜时,这些组合物具有低介电常数、低吸湿性和高热稳定性等性质。这些薄膜适用于作为多级互连的
金属间介电层。