Verfahren zur Herstellung von monobenzoylierten 1,8-Diaminoanthrachinonen
申请人:BAYER AG
公开号:EP0099071A2
公开(公告)日:1984-01-25
Verfahren zur Herstellung von gegebenenfalls substituiertem 1-Amino-8-aroylaminoanthrachinon durch Umsetzung von gegebenenfalls substituiertem 1,8-Diaminoanthrachinon mit einem Aroylhalogenid in Gegenwart eines organischen Lösungs- oder Verdünnungsmittels, eines säurebindenden Mittels und gegebenenfalls von Wasser, dadurch gekennzeichnet, daß man in Gegenwart von tertiären aliphatischen Aminoalkoholen und/oder quartären Ammoniumverbindungen arbeitet.
AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING AND CHEMICAL MECHANICAL POLISHING METHOD FOR SEMICONDUCTOR DEVICE
申请人:JSR Corporation
公开号:EP2131389A1
公开(公告)日:2009-12-09
A chemical mechanical polishing aqueous dispersion includes (A) colloidal silica having an average particle size calculated from the specific surface area determined by the BET method of 10 to 60 nm, (B) an organic acid having two or more carboxyl groups and one or more hydroxyl groups in one molecule, and (C) a quaternary ammonium compound shown by the following general formula (1),
wherein R1 to R4 individually represent hydrocarbon groups, and M- represents an anion, the chemical mechanical polishing aqueous dispersion having a pH of 3 to 5.
This invention relates to a cleaning agent for a semi-conductor substrate, particularly, one having copper wirings on its surface, comprising a nonionic surfactant and a method for cleaning the same.
The said cleaning agent and the method have made it possible to control a speed of etching on silicone oxide so as to remove impurities adsorbed on copper wirings and silicone oxide on a surface of a semi-conductor substrate having copper wirings on its surface, such as copper oxides and particles, without causing corrosion or oxidation of copper wirings nor causing roughness on the surface.