PATTERN FORMING METHOD, CHEMICAL AMPLIFICATION RESIST COMPOSITION AND RESIST FILM
申请人:Enomoto Yuichiro
公开号:US20120148957A1
公开(公告)日:2012-06-14
A pattern forming method includes: (i) forming a film from a chemical amplification resist composition; (ii) exposing the film, so as to form an exposed film; and (iii) developing the exposed film by using an organic solvent-containing developer, wherein the chemical amplification resist composition contains: (A) a resin substantially insoluble in alkali; (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation; (C) a crosslinking agent; and (D) a solvent, a negative chemical amplification resist composition used in the method, and a resist film formed from the negative chemical amplification resist composition.
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING PATTERN WITH THE COMPOSITION
申请人:TSUCHIMURA Tomotaka
公开号:US20110171577A1
公开(公告)日:2011-07-14
An actinic ray-sensitive or radiation-sensitive resin composition includes any of the compounds of general formula (I) below;
wherein:
Ar represents an aromatic ring that may have a substituent other than the -(A-B) groups;
n is an integer of 1 or greater;
A represents any one, or a combination of two or more members selected from a single bond, an alkylene group, —O—, —S—, —C(═O)—, —S(═O)—, —S(═O)
2
— and —OS(═O)
2
—, provided that —C(═O)O— is excluded;
B represents a group containing a hydrocarbon group having 4 or more carbon atoms wherein either a tertiary or a quaternary carbon atom is contained,
when n is 2 or greater, the two or more -(A-B) groups may be identical to or different from each other; and
M
+
represents an organic onium ion.
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM USING THE COMPOSITION AND PATTERN FORMING METHOD
申请人:Inasaki Takeshi
公开号:US20120301817A1
公开(公告)日:2012-11-29
An actinic ray-sensitive or radiation-sensitive resin composition comprising (P) a resin having a repeating unit represented by the following formula (1), a resist film using the composition, and a pattern forming method.
ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF FORMING PATTERN USING THE COMPOSITION
申请人:Tsubaki Hideaki
公开号:US20120003585A1
公开(公告)日:2012-01-05
According to one embodiment, an actinic-ray- or radiation-sensitive resin composition comprises (A) any of the compounds of General Formula (I) below and (B) a resin that contains the residue (c) of a compound having an ionization potential value lower than that of phenol and when acted on by an acid, exhibits an increased solubility in an alkali developer,
wherein
Ar represents an aromatic ring having Cy groups and optionally further other substituents,
n is an integer of 2 or greater,
Cy represents a group having a substituted or unsubstituted alkyl group or a group having a substituted or unsubstituted cycloaliphatic group, provided that a plurality of Cy groups may be identical with or different from each other, and
M
+
represents an organic onium ion.
CHEMICAL AMPLIFICATION RESIST COMPOSITION, AND MOLD PREPARATION METHOD AND RESIST FILM USING THE SAME
申请人:Fujimori Toru
公开号:US20120006788A1
公开(公告)日:2012-01-12
A chemical amplification resist composition that is used for preparation of a mold, and a mold preparation method and a resist film each using the composition are provided.