According to one embodiment, an actinic-ray- or radiation-sensitive resin composition comprises (A) any of the compounds of General Formula (I) below and (B) a resin that contains the residue (c) of a compound having an ionization potential value lower than that of phenol and when acted on by an acid, exhibits an increased solubility in an alkali developer,
wherein
Ar represents an aromatic ring having Cy groups and optionally further other substituents,
n is an integer of 2 or greater,
Cy represents a group having a substituted or unsubstituted alkyl group or a group having a substituted or unsubstituted cycloaliphatic group, provided that a plurality of Cy groups may be identical with or different from each other, and
M
+
represents an organic onium ion.
根据一种实施例,一种光致射线或辐射敏感的
树脂组合物包括(A)下述通式(I)中的任何化合物和(B)含有化合物残基(c)的
树脂,该化合物的电离势值低于
苯酚,并在受酸作用时,在碱性显影剂中表现出增加的溶解性,其中Ar代表具有Cy基团和可选择进一步的其他取代基的芳香环,n为2或更大的整数,Cy代表具有取代或未取代的烷基或具有取代或未取代的环状脂肪族基团的基团,只要多个Cy基团可以相同或不同,M+代表有机阳离子。