申请人:Wako Pure Chemical Industries, Ltd.
公开号:US05558971A1
公开(公告)日:1996-09-24
A resist material comprising (a) a terpolymer, (b) a photoacid generator, and (c) a solvent has high light sensitivity, heat resistance, adhesiveness, resolution, etc., and is suitable for forming a pattern of rectangular shape.
一种抗阻材料包括(a)三元聚合物,(b)光酸发生剂和(c)溶剂,具有高光敏度,耐热性,粘附性,分辨率等特点,适用于形成矩形形状的图案。