To provide a photosensitive resin which realizes formation of a pattern having a good shape, without involving a problem in terms of poor compatibility between an acid generator and a photoresist primary-component polymer having an acid dissociable group, and a photosensitive composition containing the photosensitive resin.
The photosensitive resin includes a repeating unit represented by formula (1):
(wherein R
1
represents a C2-C9 linear or branched divalent hydrocarbon group; each of R
2
to R
5
represents a hydrogen atom or a C1-C3 linear or branched hydrocarbon group; each of R
6
and R
7
represents an organic group, wherein R
6
and R
7
may together form a divalent organic group; and X
−
represents an anion);
at least one of a repeating unit represented by formula (2):
(wherein R
8
represents a C2-C9 linear or branched hydrocarbon group) and a repeating unit represented by formula (3):
a repeating unit represented by formula (4):
optionally, a repeating unit represented by formula (5).
提供一种光敏
树脂,实现形成具有良好形状的图案,而不涉及酸发生剂和具有酸可解离基团的光刻原料主要组分聚合物之间相容性差的问题,并且包含该光敏
树脂的光敏组合物。该光敏
树脂包括由式(1)表示的重复单元:(其中R1表示C2-C9线性或支链二价碳氢基团;R2至R5中的每一个表示氢原子或C1-C3线性或支链碳氢基团;R6和R7中的每一个表示有机基团,其中R6和R7可以共同形成二价有机基团;X-表示阴离子);由式(2)表示的重复单元中的至少一个:(其中R8表示C2-C9线性或支链碳氢基团)和由式(3)表示的重复单元;由式(4)表示的重复单元;可选地,由式(5)表示的重复单元。