ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, AND, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM AND PATTERN FORMING METHOD, EACH USING THE SAME
申请人:FUJIFILM Corporation
公开号:US20150004533A1
公开(公告)日:2015-01-01
An actinic ray-sensitive or radiation-sensitive resin composition in the present invention contains a nitrogen-containing compound (N) which is represented by the following general formula (N1):
wherein, in the general formula (N1),
X represents a group including a hetero atom;
L represents a single bond or an alkylene group;
R
2
represents a substituent, in the case where a plurality of R
2
's are present, they may be the same as or different from each other and a plurality of R
2
's may be bonded to each other to form a ring;
R
3
represents a hydrogen atom or a substituent; and
n represents an integer of 0 to 4.