Tertiary butyl 4,4-bis(4′-hydroxyphenyl) pentanoate derivatives and positive resist materials containing the same
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US06667415B1
公开(公告)日:2003-12-23
Disclosed are novel tert-butyl 4,4-bis(4′-hydroxyphenyl)pentanoate derivatives represented by the following general formula (I);
wherein R1 represents a protective group which can be readily eliminated under an acidic condition, and R2 represents a hydrogen atom, a lower alkyl group or a lower alkoxy group: and high energy radiation-responsive positive resist materials using said novel derivatives as dissolution inhibitors.
揭示了一种新颖的由以下一般式(I)表示的叔丁基4,4-双(4'-羟基苯基)戊酸酯衍生物;其中R1代表可在酸性条件下轻松消除的保护基,R2代表氢原子、较低的烷基或较低的烷氧基:以及使用这些新颖衍生物作为溶解抑制剂的高能辐射响应型正电子抗蚀材料。