申请人:SAN-APRO LTD.
公开号:US20140357896A1
公开(公告)日:2014-12-04
Provided is a novel sulfonium salt that has high solubility in a solvent and has high light sensitivity to, especially, light having a wavelength not longer than deep-UV (254 nm) and a novel photo-acid generator comprising the sulfonium salt. The invention relates to a sulfonium salt represented by the following general formula (1) and a novel photo-acid generator comprising the sulfonium salt.
wherein R
1
represents an electron withdrawing group; R
2
and R
3
each independently represent an alkyl group having 1 to 5 carbon atoms, an alkoxy group, an acyl group, a halogenated alkyl group, a halogen atom, a hydroxyl group, a cyano group, or a nitro group; p and q each independently represent an integer of 0 to 5; and X
−
represents a monovalent counter anion.
提供的是一种新型的磺鎵鹽,其在溶剂中具有高溶解度,并且具有高光敏度,特别是对波长不长于深紫外线(254 nm)的光线敏感,以及包括该磺鎵鹽的新型光酸发生剂。本发明涉及以下通式(1)所表示的磺鎵鹽和包括该磺鎵鹽的新型光酸发生剂。其中,R1代表电子提取基;R2和R3各自独立地代表具有1到5个碳原子的烷基、烷氧基、酰基、卤代烷基、卤素原子、羟基、氰基或硝基的基团;p和q各自独立地代表0到5的整数;X-代表一价的对离子。