ADHESIVE COMPOSITION, ADHESIVE TAPE, METHOD FOR PROCESSING SEMICONDUCTOR WAFER AND METHOD FOR PRODUCING TSV WAFER
申请人:Sekisui Chemical Co., Ltd.
公开号:EP2551323A1
公开(公告)日:2013-01-30
The present invention aims to provide an adhesive composition having high adhesive strength, as well as being easily detachable and having excellent heat resistance, an adhesive tape comprising the adhesive composition, a method for treating a semiconductor wafer using the adhesive tape, and a method for producing a TSV wafer. The present invention relates to an adhesive composition comprising: an adhesive component; and a tetrazole compound represented by the following formula (1), formula (2), or formula (3), or its salt:
wherein R1 and R2 each may be hydrogen, a hydroxy group, an amino group, or a C1-C7 alkyl group, alkylene group, phenyl group, or mercapto group; and the C1-C7 alkyl group, alkylene group, phenyl group, and mercapto group may be substituted.
Provided is a gas-generating material which can generate a gas in a large amount per unit time and has high storage stability.
The gas-generating material 11a according to the present invention comprises a gas-generating agent that is an azo compound or an azide compound, a tertiary amine, a photosensitizing agent and a binder resin.
Provided is a gas-generating material which exhibits a high adhesive property to a member to be adhered and which makes it possible to generate a gas in a large amount per unit time even when the gas-generating material contains a silane coupling agent. The gas-generating material according to the present invention contains: a binder resin; a gas-generating agent which is an azo compound or an azide compound; and a silane coupling agent having an amino group.
Provided is a gas-generating material which exhibits a high adhesive property to a member to be adhered and which makes it possible to generate a gas in a large amount per unit time even when the gas-generating material contains a silane coupling agent. The gas-generating material according to the present invention contains: a binder resin; a gas-generating agent which is an azo compound or an azide compound; and a silane coupling agent having an amino group.