IODIZED AROMATIC CARBOXYLIC ACID TYPE PENDANT-CONTAINING POLYMER, RESIST COMPOSITION AND PATTERNING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20210333712A1
公开(公告)日:2021-10-28
An iodized aromatic carboxylic acid type pendant-containing polymer is provided. A resist composition comprising the same offers a high sensitivity and is unsusceptible to nano-bridging, pattern collapse or residue formation, independent of whether it is of positive or negative tone.
US7449447B2
申请人:——
公开号:US7449447B2
公开(公告)日:2008-11-11
Atom- and Step-Economical Ruthenium-Catalyzed Synthesis of Esters from Aldehydes or Ketones and Carboxylic Acids
作者:Sofiya A. Runikhina、Dmitry L. Usanov、Alexander O. Chizhov、Denis Chusov
DOI:10.1021/acs.orglett.8b03375
日期:2018.12.21
We developed a ruthenium-catalyzed reductive estersynthesisfrom aldehydes or ketones and carboxylic acids using carbon monoxide as a deoxygenative agent. Multiple factors influencing the outcome of the reaction were investigated. Best results were obtained for commercially available and inexpensive benzene ruthenium chloride; as low as 0.5 mol % of the catalyst is sufficient for efficient reaction