申请人:Korea Kumho Petrochemical Co. Ltd.
公开号:EP1022269A3
公开(公告)日:2003-04-02
This invention relates to a process of synthesizing a novel sulfonium salt represented by the following formula 1 in such a manner that the sulfide compound represented by the following formula 2 is reacted with perfluoroalkanesulfonic anhydride represented by the following formula 3:Wherein, R1 is a hydrogen atom, an alkyl group of 1 to 20 carbon atoms in a linear, branched or cyclic form, halogen atom, alkoxy group, phenoxy group, phenyl group, thioalkoxy group, or thiophenoxy group;R2 is an alkyl group of 1 to 20 carbon atoms in a linear, branched or cyclic form, aryl group or allyl group;n is an integer of 0 to 20.Wherein, R1 and R2 are same as defined above.Wherein, n is same as defined above.The process of manufacturing a novel sulfonium salt according to this invention can provide the following advantages in that a) sulfonium salt can be synthesized via one step reaction using perfluoroalkanesulfonic anhydride, b) sulfonium salt having higher yield than high-priced sulfoxide compound can be also synthesized using low-priced sulfide compound. Further, sulfonium salt is effectively used as a photo-acid initiator or radical photo-initiator in polymerisation and as a catalyst to leave the protective groups of organic compounds, especially as a photo-acid generator in a chemical amplified photoresist used for semiconductor material.
这项发明涉及一种合成一种新型硫铵盐的过程,该硫铵盐由以下式1表示,其合成方式是将以下式2表示的硫化合物与以下式3表示的全氟烷磺酸酐发生反应:其中,R1是氢原子、1到20个碳原子的线性、支链或环状的烷基、卤原子、烷氧基、苯氧基、苯基、硫代烷氧基或硫代苯氧基;R2是1到20个碳原子的线性、支链或环状的烷基、芳基或烯丙基;n是0到20的整数。其中,R1和R2与上述定义相同。其中,n与上述定义相同。根据这项发明制造新型硫铵盐的过程具有以下优点:a) 可以通过一步反应使用全氟烷磺酸酐合成硫铵盐;b) 可以使用廉价的硫化合物合成产率比高价亚砜化合物高的硫铵盐。此外,硫铵盐可有效用作聚合物化学中的光酸引发剂或自由基光引发剂,用作催化剂去除有机化合物的保护基,特别是作为半导体材料用于化学增强型光阻的光酸发生剂。