申请人:FUJIFILM Corporation
公开号:EP3992713A1
公开(公告)日:2022-05-04
Provided is a method for producing a radiation-sensitive resin composition, in which the occurrence of defects in a pattern thus formed is suppressed and a fluctuation in a sensitivity after long-term storage is suppressed. The method for producing a radiation-sensitive resin composition includes a step 1 of putting at least a resin having a polarity that increases by an action of an acid, a photoacid generator, and a solvent into a stirring tank, and a step 2 of producing a radiation-sensitive resin composition by stirring and mixing the resin having a polarity that increases by the action of an acid, the photoacid generator, and the solvent in the stirring tank under a gas having an inert gas concentration of 90% by volume or more, in which in the step 2, an atmospheric pressure inside the stirring tank is higher than an atmospheric pressure outside the stirring tank, and in the step 2, a difference between the atmospheric pressure inside the stirring tank and the atmospheric pressure outside the stirring tank is 2.0 kPa or less.
本发明提供了一种生产辐射敏感树脂组合物的方法,该方法可抑制由此形成的图案中出现缺陷,并可抑制长期储存后的灵敏度波动。生产辐射敏感树脂组合物的方法包括步骤 1:将至少一种在酸的作用下极性增强的树脂、光酸发生器和溶剂放入搅拌罐中;步骤 2:通过在搅拌罐中搅拌和混合在酸的作用下极性增强的树脂、光酸发生器和溶剂,生产辐射敏感树脂组合物、在惰性气体浓度为 90% (体积比)或更高的气体下,在搅拌罐中搅拌并混合具有极性的树脂、光酸发生器和溶剂,其中在步骤 2 中,搅拌罐内的大气压力高于搅拌罐外的大气压力,并且在步骤 2 中,搅拌罐内的大气压力与搅拌罐外的大气压力之差为 2.0 千帕或更小。