[EN] POLYMER COMPOSITIONS FOR SELF-ASSEMBLY APPLICATIONS<br/>[FR] COMPOSITIONS POLYMÈRES POUR APPLICATIONS D'AUTO-ASSEMBLAGE
申请人:AZ ELECTRONIC MAT LUXEMBOURG SARL
公开号:WO2018033559A1
公开(公告)日:2018-02-22
The present invention relates to a composition comprises at least one random copolymer having at least one repeat unit of structure (1 ), The present invention also relates to novel processes for forming patterns using this novel crosslinked layer on a substrate by enable a film of a block copolymer coated on the novel crosslinked layer to undergo self-assembly.
本发明涉及一种组合物,其中包括至少一种具有结构(1)的随机共聚物重复单元。本发明还涉及使用这种新型交联层在基底上形成图案的新型工艺,通过使涂覆在新型交联层上的嵌段共聚物薄膜进行自组装。