The reactivity of [bis(1-adamantylcarbonyloxy)iodo] arenes with 4-methylquinoline (substitution) as a typical heteroaromatic base and phenyl vinyl sulfone (addition) as atypical activated olefin has been studied under thermal and irradiation conditions. The results suggest that electron-withdrawing groups on the aromatic ring in [bis(1-adamantylcarbonyloxy)iodo]arenes are detrimental to reactions. The crystal structures of [bis(1-adamantylcarbonyloxy)iodo]arenes Ib and le are reported.
Photoresist composition, compound and process of producing photoresist pattern
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US09448475B2
公开(公告)日:2016-09-20
A photoresist composition comprising
a resin having an acid-labile group,
an acid generator, and
a compound represented by formula (I0).