1,1,2-tris(trifluoromethyl)cyclopropane

• 分子结构分类: 有机化合物 - 有机卤素化合物 - 有机氟化物
• 英文名称: 1,1,2-tris(trifluoromethyl)cyclopropane
• 英文别名: 1,1,2-Tris(trifluoromethyl)cyclopropane
• 化学式: C₆H₃F₉
• 分子量: 246.075
• InChiKey: YNYWAJDREBDWQK-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  4.1
• 重原子数：
  15
• 可旋转键数：
  0
• 环数：
  1.0
• sp3杂化的碳原子比例：
  1.0
• 拓扑面积：
  0
• 氢给体数：
  0
• 氢受体数：
  9

反应信息

• 作为产物：
  描述：

  环丙烷-1,1,2-三羧酸 在 sulfur tetrafluoride 作用下， 反应 4.5h， 以15%的产率得到1,1,2-tris(trifluoromethyl)cyclopropane
  参考文献：
  名称：

  环烷羧酸与SF 4的反应。I.用SF 4氟化环丙烷多羧酸

  摘要：

  当用SF 4处理时，具有一个以上羧基的环丙烷羧酸容易发生氟化反应，生成相应的聚（三氟甲基）环丙烷和双环醚。

  DOI：

  10.1016/0022-1139(93)02996-r

文献信息

• Substrate treating apparatus and substrate treating method
  申请人：SCREEN Holdings Co., Ltd.

  公开号：US10153181B2

  公开（公告）日：2018-12-11

  Disclosed is a substrate treating apparatus including the following units: a supplying unit which supplies a process liquid including a sublimable substance in a melt state on a pattern-formed surface of a substrate W; a solidifying unit which solidifies the process liquid on the pattern-formed surface to produce a solidified body; and a sublimating unit which sublimates the solidified body to remove the solidified body from the pattern-formed surface. In this apparatus, the sublimable substance includes a fluorinated carbon compound.

  公开了一种基板处理设备，包括以下单元：供应单元，用于在基板 W 的图案形成表面上供应熔融状态的加工液，其中包括可升华物质；凝固单元，用于在图案形成表面上凝固加工液，以产生凝固体；以及升华单元，用于使凝固体升华，以从图案形成表面上去除凝固体。在该装置中，可升华物质包括氟化碳化合物。
• SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
  申请人：SCREEN Holdings Co., Ltd.

  公开号：US20170345683A1

  公开（公告）日：2017-11-30

  Disclosed is a substrate treating apparatus including the following units: a supplying unit which supplies a process liquid including a sublimable substance in a melt state on a pattern-formed surface of a substrate W; a solidifying unit which solidifies the process liquid on the pattern-formed surface to produce a solidified body; and a sublimating unit which sublimates the solidified body to remove the solidified body from the pattern-formed surface. In this apparatus, the sublimable substance includes a fluorinated carbon compound.
• SUBSTRATE TREATING METHOD, SUBSTRATE TREATING LIQUID AND SUBSTRATE TREATING APPARATUS
  申请人：SCREEN Holdings Co., Ltd.

  公开号：US20200135503A1

  公开（公告）日：2020-04-30

  A substrate treating method, liquid and apparatus are provided which can reduce the amount of sublimable substance used for the drying of a substrate while reducing the collapse of pattern. The substrate treating method includes a step of supplying a liquid to the pattern-formed surface of the substrate, a step of solidifying the liquid on the pattern-formed surface to form a solidified body and a step of subliming the solidified body so as to remove it from the pattern-formed surface. The substrate treating liquid includes a molten sublimable substance and a solvent, the freezing point of the sublimable substance being higher than the freezing point of the solvent. When the sublimable substance and the solvent are separated, the sublimable substance is settled and in the solidification step, the settled sublimable substance is solidified to have a height equal to or higher than the height of a pattern.
• US7704746B1
  申请人：——

  公开号：US7704746B1

  公开（公告）日：2010-04-27
• Reactions of cycloalkanecarboxylic acids with SF4. I. Fluorination of cyclopropanepolycarboxylic acids with SF4
  作者：Yu.M. Pustovit、P.I. Ogojko、V.P. Nazaretian、L.B. Faryat'eva

  DOI：10.1016/0022-1139(93)02996-r

  日期：1994.12

  Cyclopropanecarboxylic acids possessing more than one carboxylic group readily undergo fluorination when treated with SF4 to yield the corresponding poly(trifluoromethyl)cyclopropanes and bicyclic ethers.

  当用SF 4处理时，具有一个以上羧基的环丙烷羧酸容易发生氟化反应，生成相应的聚（三氟甲基）环丙烷和双环醚。