The present invention provides a salt of the formula (I):
wherein ring Y represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, in which one —CH
2
— group is substituted with —COO— group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q
1
and Q
2
each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A
+
represents organic counter ion; and n shows an integer of 0 to 12.
The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
本发明提供了一种具有公式(I)的盐:
其中环Y代表具有3至30个
碳原子的单环或多元
环烃基团,其中一个—
CH2—基团被—COO—基团取代,并且单环或多元
环烃基团中的至少一个
氢原子可以可选地被具有1至6个
碳原子的烷基取代,具有1至6个
碳原子的烷
氧基,具有1至4个
碳原子的
全氟烷基,具有1至6个
碳原子的羟基烷基,羟基或腈基;Q1和Q2各自独立地代表
氟原子或具有1至6个
碳原子的
全氟烷基;A+代表有机反离子;n表示0至12的整数。
本发明还提供了一种含有公式(I)盐的
化学放大抗蚀剂组合物。