MODIFIED HYDROXY NAPHTHALENE NOVOLAK RESIN, PRODUCTION METHOD FOR MODIFIED HYDROXY NAPHTHALENE NOVOLAK RESIN, PHOTOSENSITIVE COMPOSITION, RESIST MATERIAL AND COATING
申请人:DIC CORPORATION
公开号:US20160177020A1
公开(公告)日:2016-06-23
There is provided a modified hydroxy naphthalene novolak resin optimal for a photosensitive composition and a resist material having high optical sensitivity, resolution, and alkali developability, and excellent heat resistance and moisture absorption resistance, and the modified hydroxy naphthalene novolak resin includes a structural moiety (I). In the formula, le is any one of a hydrogen atom, a tertiary alkyl group, an alkoxyalkyl group, an acyl group, an alkoxycarbonyl group, a hetero atom-containing cyclic hydrocarbon group, and a trialkylsilyl group; m is 1 or 2; R
2
's each independently is any one of a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, an aralkyl group, and a halogen atom; and at least one of the R
1
's present in the resin is any one of a tertiary alkyl group, an alkoxyalkyl group, an acyl group, an alkoxycarbonyl group, a hetero atom-containing cyclic hydrocarbon group, and a trialkylsilyl group.
提供了一种改性羟基萘酚诺伏酚树脂,最适用于具有高光学灵敏度、分辨率和碱性可开发性、以及出色的耐热性和吸湿性的光敏组合物和抗蚀材料,所述改性羟基萘酚诺伏酚树脂包括结构基团(I)。在公式中,le是氢原子、三级烷基、烷氧基烷基、酰基、烷氧羰基、含杂原子的环烃基和三烷基硅基中的任意一种;m为1或2;R2各自独立地是氢原子、烷基、烷氧基、芳基、芳基烷基和卤素原子中的任意一种;并且树脂中存在的至少一个R1是三级烷基、烷氧基烷基、酰基、烷氧羰基、含杂原子的环烃基和三烷基硅基中的任意一种。