申请人:Hatakeyama Jun
公开号:US20130084528A1
公开(公告)日:2013-04-04
A positive resist composition comprising a polymer having carboxyl groups substituted with an acid labile group having formula (1) exhibits a high contrast of alkaline dissolution rate before and after exposure, a high resolution, a reduced acid diffusion rate, and forms a pattern with good profile, minimal edge roughness, and etch resistance. In formula (1), R
1
is methylene or ethylene, R
2
is alkyl, aryl, or alkenyl, which may contain oxygen or sulfur, R
3
is fluorine or trifluoromethyl, and m is an integer of 1 to 4.