Twofold CH functionalization of aromatic sulfonic acids was achieved with an in situ generated ruthenium(II) catalyst. The optimized cross‐dehydrogenative alkenylation protocol proved applicable to differently substituted arenes and a variety of alkenes, including vinyl arenes, sulfones, nitriles and ketones. The robustness of the ruthenium(II) catalyst was demonstrated by the chemoselective oxidative
CMP method for copper, tungsten, titanium, polysilicon, and other substrates using organosulfonic acids as oxidizers
申请人:Carter K. Melvin
公开号:US20050090109A1
公开(公告)日:2005-04-28
The invention relates to chemical mechanical polishing of substrates using an abrasive and a fluid composition, wherein certain organosulfonic acid compounds are used as oxidizers, and particularly relates to a method of polishing substrates comprising copper, tungsten, titanium, and/or polysilicon using a chemical-mechanical polishing system comprising organosulfonic acids having an electrochemical oxidation potential greater than 0.2V as an oxidizer.