Influence of Oxygen on the Crystalline−Amorphous Transition in Gallium Nitride Films
作者:Nguyen H. Tran、Robert N. Lamb、Lee Jene Lai、Yaw Wen Yang
DOI:10.1021/jp052177r
日期:2005.10.1
Oxygen is a common impurity in nitride-based materials that affects the properties of technologically important materials such as gallium nitride semiconductors. In this work, the influence of oxygen on the structural evolution of GaN films is investigated using near-edge X-ray absorption fine structure (NEXAFS). The combined spectra of Ga L-3-edge, N K-edge, and O K-edge indicate that the gallium coordination, formed by a mixture of oxide and nitride bonds, is directly dependent on the concentration of oxygen in the films. Below 24 atom % oxygen, gallium atoms are tetrahedrally coordinated within the films, while at higher concentrations the octahedral environment persists.
X-ray crystal structure of the dimethylgallium azide polymer and its use as a gallium nitride precursor
作者:David A. Atwood、Richard A. Jones、Alan H. Cowley、Jerry L. Atwood、Simon G. Bott
DOI:10.1016/0022-328x(90)87270-n
日期:1990.8
An X-ray diffraction study reveals that dimethylgallium azide (1) exists as a polymer in the solid state. The basic repeating unit, Me2GaN3, forms a spiral along the a-axis of an orthohombic unit cell. Compound 1 serves as a gallium nitride precursor.
X射线衍射研究表明,叠氮化二甲基镓(1)以固态形式作为聚合物存在。基本重复单元Me 2 GaN 3沿着正交晶胞的a轴形成螺旋。化合物1用作氮化镓前体。