申请人:AMP Incorporated
公开号:US05021398A1
公开(公告)日:1991-06-04
The present invention describes a method to produce a patterned superconducting solid preferably as a thin film. Unsaturated organic acid metal salts of suitable metals are dissolved in an organic solvent, mixed thoroughly and cast as a film on a substrate. The concentration of these organic carboxylate metal salts is adjusted such that a superconducting metal oxide ratio is obtained upon pyrolysis at temperatures up to 1000.degree. C. with subsequent slow cooling. A pattern (mask) is placed over the film and the film is irradiated to polymerize and crosslink the exposed portions. The unpolymerized and uncrosslinked portions are removed usually by using selective solvents or solvent mixtures. The solid remaining is heated in oxygen or air to about 1000.degree. C., which removes the organic portions and leaves metal oxide residue. The metal oxides are then cooled slowly and annealed to produce the patterned metal oxide superconducting materials. The articles of manufacture produced are useful in fabricating devices requiring superconducting thin films in addition to other uses.
本发明描述了一种制备图案超导固体的方法,最好是作为薄膜。将合适金属的不饱和有机酸金属盐溶解在有机溶剂中,充分混合并铸成薄膜放在基板上。调整这些有机羧酸金属盐的浓度,使在高达1000°C的热解过程中获得超导金属氧化物比例,随后缓慢冷却。将图案(掩膜)放在薄膜上,并照射薄膜以使暴露部分聚合和交联。通常使用选择性溶剂或溶剂混合物去除未聚合和未交联的部分。剩余的固体在氧气或空气中加热到约1000°C,这将去除有机部分并留下金属氧化物残留物。然后缓慢冷却和退火以产生图案的金属氧化物超导材料。制造出的制品在制造需要超导薄膜的设备以及其他用途方面非常有用。