TRIS(DIALKYLAMIDE)ALUMINUM COMPOUND, AND METHOD FOR PRODUCING ALUMINUM-CONTAINING THIN FILM USING SAME
申请人:UBE INDUSTRIES, LTD.
公开号:US20140295084A1
公开(公告)日:2014-10-02
The present invention relates to a tris(dialkylamide)aluminum compound, and a method for producing an aluminum-containing thin film using the aluminum compound, the tris(dialkylamide)aluminum compound being represented by the formula (1):
wherein
R represents a linear alkyl group having 1 to 6 carbon atoms; and
R
1
, R
2
and R
3
may be the same as, or different from each other, and each independently represents hydrogen atom, or a linear or branched alkyl group having 1 to 6 carbon atoms, or R
1
, R
2
and R
3
may be joined together to form a ring,
with the proviso that the compounds in which two or more of R
1
, R
2
and R
3
are hydrogen atoms are excluded, and
three dialkylamide ligands may be the same as, or different from each other.
本发明涉及一种三(二烷基酰胺)铝化合物以及使用该铝化合物制备含铝薄膜的方法,该三(二烷基酰胺)铝化合物由式(1)表示:其中,R表示1至6个碳原子的线性烷基;R1、R2和R3可以相同或不同,且分别独立地表示氢原子或1至6个碳原子的线性或支链烷基,或R1、R2和R3可以相互结合形成环;其中,化合物中两个或更多的R1、R2和R3为氢原子的化合物被排除在外,三个二烷基酰胺配体可以相同或不同。