申请人:JSR Corporation
公开号:US07217492B2
公开(公告)日:2007-05-15
An onium salt compound having a cation moiety of the following formula (1) is disclosed.
wherein A represents I or S, m is 1 or 2, n is 0 or 1, x is 1–10, and Ar1 and Ar2 are (substituted) aromatic hydrocarbon group, and P represents —O—SO2R, —O—S(O)R, or —SO2R, wherein R represents a hydrogen atom, a (substituted) alkyl group, or a (substituted) alicyclic hydrocarbon group. The onium salt compound is suitable as a photoacid generator for photoresists of a positive-tone radiation-sensitive resin composition. The positive-tone radiation-sensitive resin composition containing this compound is useful as a chemically-amplified photoresist exhibiting high resolution at high sensitivity, responsive to various radiations, and having outstanding storage stability.
揭示了具有以下式(1)的阳离子部分的醇盐化合物,其中A代表I或S,m为1或2,n为0或1,x为1-10,Ar1和Ar2为(取代的)芳香烃基团,P代表—O—SO2R,—O—S(O)R或—SO2R,其中R代表氢原子,(取代的)烷基团或(取代的)脂环烃基团。该醇盐化合物适用作为正电子辐射敏感树脂组合物的光酸发生剂。含有该化合物的正电子辐射敏感树脂组合物可用作化学增强型光刻胶,具有高分辨率、高灵敏度,对各种辐射具有响应性,并具有出色的储存稳定性。