ACTINIC-RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM FORMED USING SAID COMPOSITION, METHOD FOR FORMING PATTERN USING SAID COMPOSITION, PROCESS FOR PRODUCING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
申请人:FUJIFILM CORPORATION
公开号:US20150277225A1
公开(公告)日:2015-10-01
An actinic-ray-sensitive or radiation-sensitive resin composition contains a compound (A) which generates acid by being irradiated with actinic rays or radiation where, when relative light absorbance is ε
r
using triphenyl sulfonium nonaphlate as a reference and relative quantum efficiency is φ
r
using triphenyl sulfonium nonaphlate as a reference, the relative light absorbance ε
r
is 0.4 to 0.8 and ε
r
×φ
r
is 0.5 to 1.0.